品牌简介

品牌介绍
Ebara组件产品广泛应用于半导体、LCD面板、太阳能电池、发光二极管制造流程。

主要产品

Turbo molecular Pumps 涡轮分子泵
Dry Vacuum Pumps 干式真空泵
Special Pumps 特殊泵
CMP System 化学机械抛光系统

型号示例

EV-S 20P/N
EV-S 50P/N
EV-S100(P/N)
EV-S200(P/N)
EV-M20N
EV-M102N
EV-M202N
EV-M302N
EV-M502N
EV-M802N
ESA15-D
ESA25-D
ESA70W
ESA70W-D
ESA70WN
ESA70WN-D
ESA80W-HDF
ESA80WN-HDF
ESA100W
ESA100WN
ESA200W
ESA500W
ESR20N
ESR80W (N)
ESR100WN
ESR200W (N)
ESR300W (N)
ESR500W (N)
EST10N
EST25N
EST100WN
EST200WN
EST300WN
EST500WN
PDV250-GB
EMT420M (400 L/s)
EMT420M (400 L/s)
EMT420M (400 L/s)
EMT1300M (1,300 L/s)
EMT2400M (2,400 L/s)
EMT2400M (2,400 L/s)
EMT3300MK (3,300 L/s)

F-REX300SⅡ
F-REX200

NDCU16E-01
NDCC16E-01

PJ50/E50-R13C
PJ50/E50-R13K
PJ100/E100-R23NF

产品图片